CONCORD, Mass. - Schlumberger Verification Systems, a unit of Schlumberger Limited, and LSI Logic Corporation announced today the establishment of a Joint Development Program (JDP) in advanced metrology for the 65nm process node. As a part of the JDP, a Yosemite Ultra Low Voltage CD-SEM will be installed at LSI Logic's Gresham, Oregon fabrication facility within the Advanced Process Development Group. The research program will target the technology hurdles represented by the 65nm process node through the application of the Yosemite CD-SEM's unique capabilities.
Alain Bojarski, vice president and general manager of Schlumberger Verification Systems stated, "We are very excited that LSI Logic has chosen to embark on the JDP with us at their most advanced fabrication facility. Schlumberger Verification Systems is committed to providing the most innovative CD metrology solutions for these difficult processes and looks forward to a successful partnership with LSI in this venture."
"Given the far reaching potential of Ultra Low Voltage, and its importance in the ITRS Roadmap, we are eager to examine the benefits offered by Yosemite," added Richard Schinella, vice president research and development, LSI Logic, Gresham, Oregon. "Yosemite's capability to address fundamental metrology issues such as ArF resist line slimming, Low k dielectric charging, repeatability, and accuracy should have a strong impact in promoting faster process development cycles."
About Yosemite
Yosemite incorporates a unique design allowing for measurements at landing energies as low as 100eV. This enables measurements on sensitive materials such as 193nm resist without sample damage or compromise to measurements. The combination of Ultra Low Voltage and Critical Shape Metrology, two features unique to Yosemite, help bring the CD-SEM metrology roadmap squarely in line with that of the future requirements of the ITRS and the sub 65nm process nodes.
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About Verification Systems
Verification Systems, a business unit of Schlumberger, has been providing state of the art metrology systems to the semiconductor industry for over 17 years. VLSI recently named Verification Systems the #1 process diagnostics company in its 2003 10 BEST in Customer Satisfaction survey. Additional information is available at ultralowvoltage.com.
About LSI Logic
LSI Logic Corporation (NYSE: LSI) is a leading designer and manufacturer of communications, consumer and storage semiconductors for applications that access, interconnect and store data, voice and video. In addition, the company supplies storage network solutions for the enterprise.
For further information, contact:
Paul Knutrud
Schlumberger Verification Systems
Tel: 978 318 4041
pknutrud@concord.tt.slb.com
© Press Release 2006
